Uyilo lwe-Optical lunoluhlu olubanzi lwezicelo kwintsimi ye-semicondcuctor. Kumatshini wefoto yefoto, inkqubo ye-optical inoxanduva lokujonga i-goam yokukhanya ekhutshelwe ngumthombo wokukhanya kwaye iqhubekile kwi-silicon wifer ukubhenca ipatheni yesiphaluka. Ke ngoko, uyilo kunye nempumelelo yamacandelo ophesheya kwinkqubo yenkqubo yefoto yindlela ebalulekileyo yokuphucula ukusebenza komatshini wefoto. Oku kulandelayo zezinye zezinto zamehlo ezisetyenzisiweyo koomatshini befoto:
Injongo yokuqikelela
I-01 Imeko yokuqikelela licandelo eliphambili lomatshini weli Lithograme, lihlala liququzelela uthotho lweelensi kubandakanya iilensi zeConvex, iilensi ze-cocaves, kunye neziprofetho.
I-02 Umsebenzi wayo kukuthoba ipatheni yesekethe kwimaski kwaye ugxile kwi-wafer idityaniswe ngefoto.
I-03 Ukuchaneka kunye nokusebenza kwenjongo yokuqikelela kunefuthe lokuthatha isigqibo kwisisombululo kunye nomgangatho wokucinga womatshini weliligraphy
Isibuko
01 Izibukozisetyenziselwa ukutshintsha indlela yokukhanya kwaye ikhokele kwindawo efanelekileyo.
I-02 kwi-EUVOgraphy Lithography Lithografi, izibuko zibaluleke kakhulu kuba ukukhanya kwe-EUV kungeniswa ngokulula zizixhobo, ke ezibukweni ezinomgangatho ophezulu kufuneka zisetyenziswe.
I-03 Ukuchaneka komphezulu kunye nokuzinza komvavanyi kukwanempembelelo enkulu ekusebenzeni komatshini welili.
Iifilitha
Iifilitha ze-01 zisetyenziselwa ukususa amaza angafunekiyo yokukhanya, ukuphucula ukuchaneka kunye nomgangatho wenkqubo yefoto.
I-02 ngokukhetha isihluzo esifanelekileyo, sinokuqinisekiswa ukuba kuphela ukukhanya kwe-wavelength ekhethekileyo esebenzisa umatshini welili, ngaloo ndlela ukuphuculwa kwenkqubo yelili.
Iiprinta kunye nezinye izinto
Ukongeza, umatshini weLithograd unokusebenzisa ezinye izinto ezincediswayo ezincedisayo, ezinje ngeeprinta, iiplanga, njl. Njl. Ukhetho, uyilo kunye nokuveliswa kwezi zinto zingakhethwayo kufuneka zilandele ngokungqongqo imigangatho yobugcisa kunye neemfuno zokuqinisekisa ukuchaneka okuphezulu kunye nokusebenza kakuhle kwamatshini welili.
Isishwankathelo, ukusetyenziswa kwamacandelo omatshini kwicandelo loomatshini beLithograd kujolise ekuphuculeni intsebenzo kunye nokusebenza kwemveliso yoomatshini weliligraphy, ngaloo ndlela kuxhaswa uphuhliso lwemveliso yemveliso ye-microhelectial. Ngokuphuhliswa okuqhubekayo kwitekhnoloji yeliligraphy, impumelelo kunye nokuyizula kwamacandelo ondlela kuya kubonelela ngamandla amakhulu okuvelisa i-chips elandelayo i-chips elandelayo.
Ukufumana ezinye iingcebiso kunye neengcali zengcali, ndwendwela iwebhusayithi yethuhttps://www.jukijonoptics.com/Ukuze ufunde ngakumbi malunga neemveliso zethu kunye nezisombululo.
IXESHA LOKUQALA: UJAN-02-2025
