Indawo engaphantsi:Ukhetho
Unyamezelo lweDimensional:-0.1mm
Ukunyamezela ukutyeba:±0.05mm
Ukuthe tyaba komphezulu:1(0.5)@632.8nm
Umgangatho womphezulu:40/20
Imiphetho:Umhlaba, 0.3mm max. Ububanzi obugcwele bevel
Umngxuma ocacileyo:90%
Ukuhambelana:<30”
Ukwaleka:Rabs<0.3%@Design Wavelength